436 パルス・レーザー・デポジションによる薄膜形成に関する考察(O.S.9. 機能薄膜創成と物性)

概要

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The effect of focusing a laser beam into a high aspect ratio rectangular area on the thickness distribution of the deposit has been examined. In this experiment, the Nd:YAG laser system is set to produce pulsed beams whereby at the substrate surface, the focused beam is rectangular with dimensions of 10 mm by 0.15 mm. Numerical calculations of the expansion process based on hydrodynamics are adopted to determine the thickness distribution of the deposit. Comparison of results of the thickness distributions attained by experiment and simulation show close resemblance. Upon confirmation of the validity of the numerical calculations, the effect of the geometry of the irradiated area on the thickness distribution of the deposit and practical recipes relevant to deposition practice are presented.
社団法人日本機械学会の論文
2000-03-01