207 マイケルソン顕微干渉法を用いた磁気ディスク表面における潤滑膜流動の 2 次元画像計測

概要

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A Michelson interferometer based on the Linnik microscope configuration has been constituted and applied to the measurements of lubricant spreading on magnetic disk surfaces. Using image processing on the fringe patterns formed by the interferometer, the spreading behaviors of lubricant films can be investigated by measuring the thickness profiles of the films. This method provides complete line profiles in two dimensions and permits direct observation of spreading phenomena, in contrast to conventional point-by-point scanning method. A fringe following technique and a noise suppression technique were introduced to improve the measurement accuracy. A novel scheme was proposed to give maximum measurement sensitivity.
一般社団法人日本機械学会の論文
2000-03-24