619 プラズマ窒化のホローカソード放電を利用した迅速化(OS コーティング・溶射)

概要

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The probability of rapid plasma nitriding process assisted by hollow cathode glow discharge was examined for austenitic stainless steel SUS304. Hollow cathode discharge was realized by arranging two plate specimens on a cathode plate. Nitriding temperature measured by protected thermocouple was varied from 370 to 720℃, nitriding time was from 1 to 9 hours, and gas pressure was from 0.6 to 10 Torr. The distance between each specimens coincided with an optimum value, and it was different depending on gas pressure as 3mm for 6Torr and 15mm for 0.6Torr. At these conditions, nitriding speed was increased to about 2 times as far as conventional plasma nitriding process at the same nitriding temperature and time. This increase in nitriding speed was considered to be due to the high ionaization rate of hollow cathode discharge.
2001-11-02