OS6(2)-8(OS06W0416) Reliability Assessment for MEMS Actuator through Analysis of Resonant Frequency Variation with Defect Growth
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概要
- 論文の詳細を見る
- 一般社団法人日本機械学会の論文
- 2003-09-09
著者
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Kim Jong
School of Applied Chemical Engineering & The Institute for Catalysis Research, Chonnam National Univ
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Kim Jong
School Of Materials Science And Engineering Seoul National Univ.
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Kwon Dongil
School Of Materials Science And Engineering Seoul National Univ.
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Son Dongil
School of Materials Science and Engineering, Seoul National Univ.
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Son Dongil
School Of Materials Science And Engineering Seoul National Univ.
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