回転円盤上における液膜形成過程 : 第2報,熱・物質移動を伴う薄膜化過程の数値解析

概要

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The unsteady flow of a liquid film and the surrounding gas on a rotating disk, which is related to a spin-coating technique to form a thin uniform film on a plate, is simulated numerically with emphasis on the heat and mass transfer at the interface. The full governing equations and boundary conditions are formulated and a newly developed calculation method is applied. The numerical results reveal that the liquid film thickness decreases mainly by convection in the middle stage. The radial and azimuthal velocities are proportional to the radius, and other values are independent of it. According to these results, one-dimensional calculation models for both phases are developed. The results show that the increased viscosity due to the evaporation of the solvent has considerable effects on the film formation process when the film is sufficiently thin. The liquid film thins mainly because of evaporation in the last stage.
一般社団法人日本機械学会の論文
1989-06-25