回転円盤上における液膜形成過程 : 第1報, 初期過程の数値解析

概要

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Unsteady liquid film flow on a rotating disk, which is related to a spin coating technique to form a thin uniform film on a plate, is calculated numerically. Vewly developed calculation method, where the surface tension on the liquid surface can be taken into account, is applied. The numerical results reveal the followings : The hemi-spherical liquid on the disk, which starts to rotate impulsively from rest, spreads by a gravitational force at the first stage. The development of the distribution of radial and azimuthal velocities is affected complicatedly by the Coriolis force, viscous force and centrifugal force. The liquid spreads mainly by centrifugal force and forms a uniforml thin film on the disk at the last stage. The surface tension has a little influence on the spreading process only at the first stage.
一般社団法人日本機械学会の論文
1988-03-25