M3-11 カーボンナノチューブ垂直配向膜を透過する気体分子の散乱挙動(M3 熱流体デバイス)

概要

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Modification of surfaces with an appropriate three dimensional microscopic structure is useful to control rarefied gas flows in micro/nano devices. We adopted vertically aligned single-walled carbon nanotube arrays as this surface modifying material, and investigated the energy transfer between gas molecules and modified surface. To investigate the interaction more specifically, we measured the time of flight distributions of helium molecules that are reflected by or transmitted through the film. The transmissivity of the films depended strongly on incident angles. We developed a model which takes account of the collision cross section of carbon nanotube bundles as a function of inclined angle, and the intensity distribution calculated from the model well reproduced the experimental results.
2009-10-15