理論スペクトルを援用した精密溶断用アルゴンマイクロアークプラズマジェットの特性研究

概要

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Based upon a collisional and radiative process theory, and synthetic spectra for argon plasmas, the experimental method for spatial properties of Ar plasma jets was presented, and applied to diagnostics for micro Ar plasma jets for fine cutting. A plasma torch had a nozzle of 0.7 mm in diameter and a discharge length of 2 to 10 mm, and was operated with an arc current of 10 to 30 A. Data from a CCD image processor and Mach-Zehnder interferometer were dealt with an Abel transformation to obtain true spacial profiles of electron density and temperature, and heavy particle temperature. Electron temperature in the main flow was found to be about 12 000 to 13 500 K, electron density of an order of 10^<16> cm^<-3>, both increasing with an arc current. It was also found that heavy particle temperature was significantly lower than electron temperature in the nozzle exit region and increased to coincide with electron temperature downstream. Experimental relation of electron temperature and density could be approximated well by that calculated from steady-state collisional and radiative processes.
一般社団法人日本機械学会の論文
1999-11-25