歯車歯面形状のレーザ干渉測定における縞密度軽減を目的とした新光学系

概要

論文の詳細を見る
In interferometry measurement, it is important to obtain a clear interference fringe pattern. High density of fringes in interferometric measurement of involute gear tooth induces noises in measuring signal and makes the analysis difficult. In this paper, a new optical system to obtain an interference fringe pattern of low density is proposed. A spherical concave lens is added in the optical path of reference beam to deform the curved figure of the phase of the reference beam over the CCD plane. Selecting the focal length of the concave lens inserted, the phase difference between reference beam and object beam becomes fairly small over the CCD plane and the fringe density of the interference fringe pattern becomes lower. The effect of this new optical system is investigated.
社団法人日本機械学会の論文
1999-03-25