単結晶シリコンの微小摩擦特性に及ぼすSiO_2酸化膜の影響

概要

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With the development of micro fabrication, single crystal silicon has been used in many microelements such as micromachines. The aim of this research is to clarify the microtribological properties of single crystal silicon to improve their characteristics by silicondioxide overcoat. The specimen used in this experiment is single crystal silicon of (100) and with a overcoat of silicondioxide. Thickness of silicondioxide is 988 nm and 94.7 nm which is coated by plasma CVD method. In this experiment, frictional force between diamond stylus tip (radius of curvature 2 μm and 10 μm) and the surface of single crystal silicon and micro hardness are measured by using scratch tester and dynamic hardness tester. In this paper we show the results of micro friction characteristics of single crystal silicon by silicondioxide overcoat.
一般社団法人日本機械学会の論文
1999-01-25