413 電子線照射による金薄膜からのナノ粒子形成(T03-3 マイクロナノ理工学:nmからmmまでのテクスチャリングの創成と機能(3),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
Nanoparticles formation has been studied by means of electron-beam-induced dewetting using thin Au metal films on smooth SiO_2/Si substrates. When the Au films are irradiated with the electron-beam, the Au films are broken up into dispersed nanoparticles attached on the substrates. The characteristic distances between nanoparticles are closely related with the thickness of Au. We have also developed the techniques for the generation of periodically arranged nanoparticles. Two-dimensionally, periodically arranged Au nanoparticles with a pitch of 50 nm were obtained.
社団法人日本機械学会の論文
2008-08-02