金薄膜への電子線照射によるナノ粒子形成(機械要素,潤滑,工作,生産管理など)

概要

論文の詳細を見る
Nanoparticles formation has been studied by means of electron-beam-induced dewetting using thin Au metal films on smooth SiO_2/Si substrates. When the Au films are irradiated with the electron-beam, the Au films are broken up into dispersed nanoparticles attached on the substrates. The characteristic distances between nanoparticles are closely related with the thickness of Au. We have also developed the techniques for the generation of periodically arranged nanoparticles. Two-dimensionally, periodically arranged Au nanoparticles with a pitch of 50nm were obtained. In addition, we also fabricated Au nanoparticles over large area on smooth synthetic quartz substrates. We revealed optical properties of Au nanoparticles on smooth synthetic quartz substrates.
社団法人日本機械学会の論文
2009-02-25