摩擦力顕微鏡機構を用いた極微小な機械加工の研究 : 第2報, FFM一体形加工評価装置を用いた微細加工の特性

概要

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Nano-machining expeiment is necessary for factual understanding of the nano-machining process. From this point of view, a unique nano-machining FFM system, which has very stiff cantilever for machining, has been developed. In order to grasp the characteristics of the developed system, single crystal silicon was machined using the function of line-scanning and area scanning. As a result, two essential characters of the system have been extracted. Firstly, the shape of the traces machined by different cantilevers vary obviously because of the geometrical irregularity of the tip. And, even in case of using the same cantilever, the traces also vary little by little as repeat machining because of the wear of the cutting edge. Secondly, the depth of the trace machined by the area-scanning is about 10 times as large as the line-scanning. To explain the reason, a machining model was proposed, in which machining and removing efficiency is raised up by the feed of the scanning line. The lateral machining force changed by the type of scanning, and the shape of the cutting chips, which were observed by SEM, also vary by the feed condition. These results could prove the proposed model.
一般社団法人日本機械学会の論文
1998-10-25