光てこ式AFMを用いた表面粗さ測定における誤差因子

概要

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An atomic force microscope (AFM) can trace surface roughness using a contact probe in a similar manner to a stylus instrument, and the AFM has the advantages of high lateral resolution and low contact force because of its very soft cantilever and a feedback controller that keeps the contact force constant (less than 10^<-8>N). However, such features can cause measuring errors characteristic of an AFM. In this study, a standard sample was measured using an AFM under certain conditions in order to extract the errors from the results. The distortion of the cantilever was also observed using a microscopic interferometer. As a result, it was clarified that the cantilever was bent unexpectedly by a lateral force which acted on the tip of the probe. The feedback controller could not trace the surface geometry precisely because the precision angle sensor using an optical lever mistook the force which acted on the tip.
一般社団法人日本機械学会の論文
1996-11-25