摩擦力顕微鏡機構を用いた極微小な機械加工の研究 : 第1報, FFM一体形加工評価装置の試作

概要

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In order to control the process of the nanometer-scale machining precisely, it is necessary to understand the change of mechanism in nanometer-scale removing process. In this point of view, a unique nano-machining and measurement system, which utilizes the mechanisms of FFM, has been newly developed for the purpose of observation on nano machining in the scale from 1 to 100 nm. The system has both an original micro*cantilever for machining and an ordinary micro cantilever for AFM measurement, and it also has a device which can exchange two cantilevers alternatively. To evaluate the performance of the system, a single crystal silicon was machined and scratched by a single diamond grain which was fixed on the end of the cantilever. Then, the system could make 2μ m × 2 μm square holes of 70 nm in maximum depth. Moreover it also could make scratches obviously and measure the lateral reaction force at a time. Those results proved the system effective in nano-machining experiments.
一般社団法人日本機械学会の論文
1998-10-25