単結晶シリコンの研削加工に関する研究 : 第1報, 砥石成形が加工表面性状に及ぼす影響

概要

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To achieve a damage-free grinding surface of brittle materials, the characteristics of brittle-ductile transition must be realized and the surface texture of the grinding wheel must be adequately controlled. In the study, a grinding wheel is truncated by grinding cast iron after dressing. The peak-valley value of the cross-sectional profile of the truncated wheel is much better than the dressed one. Moreover, after analyzing the surface texture results from various experiments, it is found that the statistic mean value of the critical depth of cut d_c is approximately 40 nm by the truncated wheel with up-cut grinding. The percentage of fracture surface is decreased with the decrease in the depth of cut in each case. The data points on the skewnesskurtosis plot of ductile mode grinding surface are relatively concentrated compared to the fracture mode surface.
一般社団法人日本機械学会の論文
1992-02-25