三次元座標測定機の測定精度に関する研究 : 測定プローブの影響

概要

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The measuring accuracy of three-dimensional coordinate measuring machines (cmm's) is affected by various error factors. To improve the measuring accuracy of cmm's by numerical error correction, it is necessary to give the calibration method careful consideration for several error factors in addition to geometrical errors. For example, as for the air bearing which has been broadly used as the linear guide way of the carriages, it may be considered that the deficiently of bearing stiffness decreases the measuring accuracy of cmm's. In such a case, measured values may vary with the type of probe system. In this paper the error factor which is considered as the influence of the lack of bearing stiffness is experimentally investigated. It is clarified that the measured values of cmm's vary with the measuring type of the probe in relation to the straightness of the linear guide way.
1991-03-25