B25-077 TEMPERATURE MEASUREMENTS WITH MICRO-TFTCS
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概要
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We fabricate metal thin film thermocouples (TFTCs). Au-Pt, Cu-Ni, and W-Ni are deposited on a glass plate using standard thin film processes. The dimension of thermocouple junction is 30μm×300μm. The thermoelectric powers of TFTCs are different from those of bulk because diffusion of electrons is restricted by the very thin film. However TFTCs are still useful for temperature measurements because the thermoelectric voltage is proportional to measured temperature at thermocouple junction. The response time of Au-Pt TFTCs is about 30ns when the surface of the glass is heated by a YAG pulsed laser. The result compares favorably with measurements by a thermoreflectance method. We also describe W-Ni nano-TFTCs with micro-heater fabricated by Focused Ion Beam for the measurement of absolute temperature distribution in 10 micron area. In order to reduce the size of the TFTCs we employ a 3-dimensional structure.
- 一般社団法人日本機械学会の論文
- 2003-11-30
著者
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MIYAZAKI Koji
Departments of Surgery, Saga Medical School
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TSUKAMOTO Hiroshi
Department of Medicine and Biosystemic Science, Graduate School of Medical Sciences, Kyushu Universi
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Tsukamoto Hiroshi
Department Of Biological Functions And Engineering Kyushu Institute Of Technology
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Takamiya Toshiaki
Department of Mechanical Engineering Kyushu Institute of Technology
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Takao Kazuya
Department of Mechanical Engineering Kyushu Institute of Technology
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Miyazaki Koji
Department Of Dental Engineering (bioengineering Section) Fukuoka Dental College
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Miyazaki Koji
Department Of Biological Functions And Engineering Kyushu Institute Of Technology
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MIYAZAKI Koji
Department of Applied Chemistry, Tokyo Metropolitan University
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