B23-089 MICRO THERMOELECTRIC COOLER : INTERFACIAL EFFECTS, OPTIMIZATION AND FABRICATION
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概要
- 論文の詳細を見る
The flow of heat and electricity in a column-type micro thermoelectric cooler is analyzed by modeling the various interfacial resistances. Electron (barrier tunneling) and phonon (diffuse mismatch) boundary resistances at the thermoelectric/metal interface, and thermal non-equilibrium between electrons and phonons adjacent to this interface (cooling length), increase the thermal conduction resistance and decrease the Seebeck coefficient of the thermoelectric elements. These in turn reduce the device cooling performance, which is also affected by the thermal and electrical contact resistances at the thermoelectric/metal and metal/electrical-insulator interfaces. To produce a temperature drop of 10 K with a cooling load of 10 mW, the optimum number of thermoelement pairs, operating current, and coefficient of performance, based on vapor deposited 4 μm thick films of Bi_2Te_3 and Sb_2Te_3,are predicted for a micro thermoelectric cooler operating with a 3 V battery. In the device fabrication, the films are grown by thermal co-evaporation and patterned on Cr/Au/Ti/Pt (hot) connectors, which are deposited onto a silicon dioxide coated wafer. Although a high substrate temperature during thermoelectric film deposition is desired, this has been limited by the degradation of the photoresist used for patterning. The measured Seebeck coefficient and electrical resistivity of the thermoelectric films are reported.
- 一般社団法人日本機械学会の論文
- 2003-11-30
著者
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Da Silva
Departamento De Bioquimica Instituto De Quimica Universidade Federal Do Rio De Janeiro
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Da Silva
Department Of Mechanical Engineering University Of Michigan
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Kaviany Massoud
Department Of Mechanical Engineering University Of Michigan
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Da Silva
Departamento De Biologia Celular Universidade De Brasilia
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