水酸化ナトリウム系溶液を用いたマイクロアーク酸化によるAl基板表面への酸化アルミニウム薄膜の生成

概要

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The objective of this study was to form a polycrystalline oxide film on Al substrate using micro-arc-technology. According to the kind of electrolytic solution used micro-arc-processing was either possible or not. A crystallized Al_2O_3 film on the Al substrate was formed by micro-arc-processing in a NaOH electrolytic solution. But the discharge dispersion happened due to the condition of pretreatment on the Al substrate. This discharge dispersion did not occur in the mixed electrolytic solution of NaOH and Na_2SiO_3, and a crystallized Al_2O_3 film was formed on the Al substrate when it stabilized. In addition, the film had a bilayer structure with the under-layer near the Al substrates made of the high-density principal component γ-Al_2O_3 and α-Al_2O_3. The upper layer was made of γ-Al_2O_3 in the porous phase.
社団法人日本セラミックス協会の論文
2005-06-01