ゾルから得られた酸化スズ薄膜の硫化水素検知特性

概要

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Porous thin films of SnO_2 were prepared on an alumina substrate using hydrothermally synthesized SnO_2 sol, to investigate the influences of film-preparation conditions on the microstructure and H_2S sensing characteristics of the thin films obtained. The sensitivity and response transient to 5 ppm H_2S in air depended significantly on calcination temperature, operating temperature and film thickness. The 0.6 pm-thick SnO_2 film calcined at an optimum temperature of 700℃ exhibited gas sensitivity (the ratio of electrical resistance in air to that in gas) as high as 550 together with good response transient characteristics to 5 ppm H_2S in air at 200℃. The crystallite size of SnO_2 as well as the pore size in-creased uniformly with a rise in calcination temperature, growing to 17.4 nm and 21 nm, at 700℃, respectively. The formation of well-defined large mesopores appears to be responsible for the excel-lent H_2S sensing characteristics.
社団法人日本セラミックス協会の論文
1996-05-01