水晶振動子の温度特性を利用した新しいピエゾガスセンサ

概要

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A new type quartz piezoelectric sensor coated with a sputtered Pt film was proposed for the detection of inflammable gases, i. e., H_2, CO, and iso-butane diluted with air. The sensing signal of the new sensor is provided by an increase in resonance frequency of the crystal (ΔF) due to a temperature increase upon contact with sample gases in the temperature range 100°-400℃. The frequency change of the sensor was found to be opposite in direction; to that of a conventional adsorption type piezoelectric gas sensor operating at ambient temperature. The temperature change of the present sensor resulted from the oxidation of the inflammable gas on the surface of the catalyst film. A linear relationship between ΔF and H_2 concentration (0-0.4 vol%) was observed at the temperatures examined. The 90% response time of the present sensor to 0. 3 vol% H_2 was about 20 s at 200℃. The sensitivity of the sensor to H_2 in air increased sharply with increasing temperature above 100℃.Furthermore, the gas selectivity to H_2 was very high especially at 100°-200℃.
社団法人日本セラミックス協会の論文
1990-08-01