ゾル・ゲル法によるSrTiO_3膜の作製

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Strontium titanate (SrTiO_3) films with a thickness in the range of 100-200 nm were prepared by the sol-gel method using metal alkoxides as starting materials. The perovskite phase was observed by X-ray diffraction analysis of the films heat-treated over 600℃. The dielectric constant was 30-60, which is lower than that of SrTiO_3 ceramics (250).
社団法人日本セラミックス協会の論文
1992-08-01

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