MECHANICAL PROPERTIES OF BOROSILICATE GLASS COATED WITH ALUMINA BY SPUTTERING PROCESS

概要

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The borosilicate glass was coated with alumina ceramics by the radio-frequency (RF) magnetron sputtering method under various conditions.Mechanical properties of coated materials were investigated with respect to the sputtering condition.The hardness of alumina coating film was measured by using a dynamic microharduness tester.The film hardness was larger in thicker films and/or in films produced under higher RF output.The hardness of film produced in every condition was superior to that of the glass sudstrate.The scatter in the hardness of a thicker film was larger than that of a thinner film.The three-point bending test of coated materials and the glass substrate was also conducted.As for the coated material with the same film thickness, the bending strength improved as increasing the RF output.In the case of lower RF output, the bending strength of some coated materials became less than that of the glass substrate.The dynamics of rigid spheres was adopted in modeling the present sputtering process, and the simulation based on the model was carried out.The apparent density of particccles in simulated coating film explained qualitatively the dependence of the hardness on the RF output, which was observed experimentally.
社団法人日本材料学会の論文
1996-03-15