異方性エッチングによるシリコンマイクロ多刃工具の開発(第2報) : 切削性能評価とミリ加工機の試作

概要

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This paper describes the evaluation of machining performance for the developed micro multi-edged tool and a prototype of new cutting device by using it for plane machining. This tool is like a grinding stone and consists of micro pyramidal hillocks, which are about a few hundred nanometers tall and formed on the wet anisotropic etching in the silicon fabrication process. Though it is expected to machine aluminum alloy, glass and so on, there is a problem that is the requirement of surface contact between a material and the tool in plane machining. The developed prototype of cutting device is equipped with a new mechanism to solve this problem. In the plane machining of Al-Mg alloy by using this device, the cutting performance of micro multi-edged tool has been evaluated and it has become clear that the tool has the machining performance as well as superfinishing by using an grinding stone with superfine grains.
社団法人精密工学会の論文
2004-10-05