測長SEMにおけるビームチルト角キャリブレーション技術の開発

概要

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An image processing technique of beam-tilt angle calibration for critical dimension scanning electron microscope (CD-SEM) was proposed. In the technique the pyramid-shaped crystal sample was used as calibrator and the beam-tilt angle was estimated with the geometrical variety of the sample images. Evaluation for 40 sample images indicated that deviation of estimated beam-tilt angles was 0.13 degree (3 sigma). The technique achieved high precision and quantitative estimation for the beam-tilt angle, and will be applied for semi-conductor process control by the beam-tilt images.
公益社団法人精密工学会の論文
2005-09-05