三次元自由曲面の非接触形状測定センサの開発研究(第2報) : 光リング式センサの特性

概要

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In the previous report, the principle of the optical ring image sensor was analyzed by computer simulation by means of ray-tracing method. In this paper, the properties of the optical ring image sensor are experimentally measured and discussed not only for different surfaces, namely diffuse reflection surface, specular reflection surface and edge profile, but also for speckle noise which occurs in laser coherent. The results obtained are summerized as follows : (1) The radius of optical ring image is linearly proportional to the displacement of the target surface in optical axis. This result coincides with the theoretical analysis. (2) The speckle noise reduces by passing laser beam through a rotating diffuse glass plate. As a result, the measuring error reduces in steep inclined metal surface. (3) This sensor makes it possible to measure the displacement within an accuracy of ±50μm for inclined diffuse reflection surface up to ±80 degrees and also inclined specular reflection surface up to ±70 degrees by image processing of optical ring. (4) It is possible to measure the displacement in edges because the size of optical ring image is unaffected by edge profiles.
公益社団法人精密工学会の論文
1992-12-05