三次元自由曲面の非接触形状測定センサの開発研究(第1報) : 光リング式センサの解析

概要

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The purpose of this paper is to develop a non-contact profile sensor which will be able to measure 3-D free-form metal surfaces as well as 3-D model shapes. The proposed profile sensor called optical ring image sensor has two major advantages. First, reflection light from a target surface in optical axis can be detected in all direction using a ring slit. Second, the radius of optical ring image is linearly proportional to the displacement of the surface in optical axis. From computer simulation by means of ray-tracing method, this sensor makes it possible to measure the displacement of a target surface within an accuracy of ±20 μm for inclined metal surface up to ±45 degrees, even though it exists specular reflection. Moreover, it is possible to measure acculately the displacements in edges because the size of optical ring image is unaffected by edge profiles.
公益社団法人精密工学会の論文
1992-11-05