散乱理論を用いた微小傷の測定評価に関する研究(第1報) : 三角形傷の散乱光強度分布の特性

概要

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The purpose of this research is to estimate quantitatively the depth of fine scratches in mirror surfaces, such as the surfaces of magnetic memory disks and laser mirrors. Bechmann's Kirchhoff Approximation, namely the theory of the scattering of electromagnetic waves, is adopted for measuring the depth of scratch. It is estimated by the linear relationships between the scratch depth and intensity-related factors representing the typical characteristics of the scattering intensity distribution obtained by computer simulation. The results obtained are summarized as follows. Firstly, the computer simulations and the experiments show that the depth of fine scratch can be estimated by introducing Bechmann's Kirchhoff Approximation. Secondly, when we approximate the scratch profile to a triangle profile, the depth of scratch is larger than 0.25μm if the two peak intensities of the scattering distribution, which are seen in almost symmetrical location to the direction of specular reflection, are larger than the intensity of a 45 deg scattering angle. On the other hand, the depth of scratch is smaller than 0.25μm if they are smaller than the intensity of a 45 deg scattering angle. Finally, it is verified experimentally that the depth of scratch from 0.1 to 1.3μm can be measured within an error range of about 30% by this method.
公益社団法人精密工学会の論文
1988-06-05