ラップ液のpHに関する研究(第2報) : ラッピング加工のインプロセス制御

概要

論文の詳細を見る
The measuring method using the variation of hydrogen ion concentration of lapping liquid was offered to appraise the state of lapping process. In the first report, it was described that the measuring method was very effective for estimating the state of crushed abrasive grains, the working pressure, and the optimum concentration. In this experiment, the basic experimental results were applied to the system which was continuously supplied the lapping compound obtained by mixing abrasive grains with purified water. The following results are experimentally confirmed : (1) The variation of working pressure, density of abrasive grains in lapping compound, and workpiece surface area can be detected in processing by measuring hydrogen ion concentration of lapping liquid. (2) The measuring method using the variation of hydrogen ion concentration of lapping liquid can also be applied to the lapping of alumina ceramics using the diamond abrasive grains.
公益社団法人精密工学会の論文
1990-01-05