ラップ液のpHに関する研究

概要

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It is difficult to control the lapping process because there is almost no measured variable to appraise the state of processing. Therefore, the measuring method using the variation of hydrogen ion concentration of lapping liquid is offered in this paper. The reason is as follows; The condition of crushing abrasive grains is one of the important factors to appraise lapping process and there is a near connection between the variation of hydrogen ion concentration of lapping liquid and the surface area of abrasive grains increased by crushing in the lapping process. This basic experiment is carried out using the lapping compound obtained by mixing α-Al_2O_3 abrasive grains with purified water. The following results are experimentally confirmed : (1) The state of crushed abrasive grains can be understood by measuring hydrogen ion concentration of lapping liquid qualitatively. (2) Hydrogen ion concentration of lapping liquid is very susceptible to the working pressure, and so the suitable working pressure can be estimated by measuring hydrogen ion concentration of lapping liquid. (3) It is possible to estimate the optimum concentration of lapping compound according to the working time on the basis of the crushing phenomenon of abrasive grains by measuring hydrogen ion concentration of lapping liquid.
公益社団法人精密工学会の論文
1988-02-05