走査型フォース顕微鏡による表面電位の検出

概要

論文の詳細を見る
In this study, a novel surface potential detection method is proposed, which introduces a heterodyne technique to a scanning force microscope (SFM). For observations of surface voltage at frequency beyond a cantilever resonance frequency, an amplitude-modulated frequency signal is used. By applying an AC voltage to the sample and an amplitude-modulated frequency voltage to the tip, the heterodyne beat signal corresponding to information of surface potential can be obtained. The tip-sample distance can be also obtained from the modulation frequency component and is controlled by the z-piezo element in such a way that the component of the modulation frequency oscillation is kept constant. As a result the simultaneous measurements of surface potential and profile of the sample have been possible without restriction of the mechanical resonance of the cantilever.
公益社団法人精密工学会の論文
2001-05-05