自動分光偏光解析装置の試作

概要

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An automatic spectroscopic ellipsometer of a rotating analyzer type is described, which is able to determine the optical constants of the samples in the spectral range of 370 nm to 800 nm. The elliPsometer is fully controlled by the micro computer and the spectroscopic measurements are accomplished automatically following the program. As the preliminary experiments,we carried out the measurements of the optical constants of the thick evaporated Au films in the spectral range of 450 nm to 750 nm. The experimental results almost agreed with those of Schulz and Bashara et al in the literature, except for the samples that were seriously affected by the residual gas in the evaporation. We also carried out the measurements of SiO_2 and MgF_2 films on Si wafer at the two wavelengths of 546 nm and 633 nm. The thickness of those films could be determined consistently in each wavelength.
1987-01-15