マイクロコンピューターを用いた光電測光型偏光解析装置の試作

概要

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An automatic measurement system of the photometric ellipsometer combined with microcomputer is described, which has been designed for the measurements of the Optical constants of the evaporated films and the bulk surfaces. The ellipsometer is of the rotating-analyser type ; it is capable of determining the ellipsometric parameters, in typical cases to δψ=0.1° and δΔ=0.1°. It takes about 1.5 minutes to accomplish the measuremet. We developed new measurement method which does not need the accurate alignment of the optical components before measurement. By carring out the measurements at two 90 degree different azimuths of the polariser, we can determine p, s directions of the optical system and the ellipsometric parameters at a time. It is also applied to the new alignment procedure which is more simpler and accurate than usual methods. The versatility of this new measurement method has been confirmed experimentally.
東京工芸大学の論文