<研究論文>導電性セラミックス/金属接合体の残留応力測定

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Electrical Sialon ceramics having some contents of TiN and SKS3 metal were joined with AgCu-Ti active brazing metal layer having a thickness of 100 /l m or 400 /l m at a temperature of1113K for 300s in a vacuum, The residual stresses on the brazed joint samples were measured inthe ceramics side and the metal side by X-ray stress analysis. The linearity in 2 e -sin' ¢diagram was confirmed for X-ray diffraction from the grinded surfaces of metal and ceramics.The residual stresses in the ceramics and metal sides of brazed joint samples indicated thecharacteristic distributions each other. The residual stress over several hundred MPa wasmeasured within about 10mm from the joint interface in the metal side of brazed joint sample.The 400 /l m thickness of the brazing metal layer was especially effective to relax the residualstress of a y in the ceramics side (a y : residual stress in vertical direction to the joint interface).And when the brazing metal layer thickness was 400 /l m, the residual stress a y in the metal sideshowed almost zero value due to the plastic deformation of the brazing metal layer.
秋田大学の論文