<論文>He^+衝撃による金属表面からの2次電子放出のシミュレーション

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Ion-induced electron emission is commonly attributed to the different mechanisms of potential emission(PE) and kinetic emission(KE). For ions approaching a metal surface PE results from Auger type electronic transitions involving surface states, whereas KE results from transfer of kinetic energy from the ion to the metal electrons after the ion has impacted the surface. Electron collision process below the surface contributes to both KE and PE. The Auger(kinetic) electrons excited below the surface interact with the metal, so that the extra electrons are produced by means of the cascade process of the Auger(kinetic) electrons. In this work, elastic and inelastic interaction processes of those electrons are simulated by the Monte Carlo model. Calculated results show large contributions of frequent-scattering Auger electrons to the total electron yield and of cascade electrons to the probability for emission of two or more electrons with the Auger neutralization of He+ ions. The energy distribution of emitted Auger electrons broadens and shifts towards low-energy side, which strongly depends on the excitation depth.
沼津工業高等専門学校の論文
1998-01-31