High-K/Metal Gate MOSFETs における新しいレイアウト依存性
スポンサーリンク
概要
- 論文の詳細を見る
- 2012-01-20
著者
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ARNAUD F.
STMicroelectronics
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ELLER M.
Infineon Technologies
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Kim J.
Samsung Advanced Institute Of Technology (sait)
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Kohler S.
Stmicroelectronics
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Celik M.
Stmicroelectronics
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Bernicot C.
STMicroelectronics
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Liang J.
Infineon Technologies
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Stahrenberg K.
Infineon Technologies
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Kim K.
Infineon Technologies
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Lee K-C.
Samsung Electronics
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Iwamoto T.
Renesas Electronics
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Teh Y-W.
GLOBALFOUNDRIES Singapore
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Park JH
Samsung Electronics
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Kim N-S.
GLOBALFOUNDRIES Singapore
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Kothari H.
STMicroelectronics
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Han J-P.
Infineon Technologies
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Miyake S.
Renesas Electronics
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Barla K.
STMicroelectronics
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Sudijono J.
GLOBALFOUNDRIES Singapore
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Ku J.-H.
Samsung Electronics
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Sekine M.
Renesas Electronics
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Johnson S.
GLOBALFOUNDRIES
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Neumueller W.
Infineon Technologies
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Sampson R.
STMicroelectronics
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SHERONY M.
IBM SRDC
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NARAYANAN V.
IBM Research Division
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森 貞之
Toshiba Corporation.
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濱口 雅史
Toshiba Corporation.
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NAIR D.
IBM SRDC
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JAEGER D.
IBM SRDC
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西村 尚志
Toshiba Corporation.
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LI W.
IBM SRDC
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NA M-H.
IBM SRDC
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高須 靖夫
Toshiba Corporation.
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SONG L.
IBM SRDC
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MEER H.
GLOBALFOUNDRIES
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DONATON R.
IBM SRDC
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宮下 桂
Toshiba Corporation.
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WACHNIK R.
IBM SRDC
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CHUDZIK M.
IBM SRDC
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KASTE E.
IBM SRDC
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DIVAKARUNI R.
IBM SRDC
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松岡 史倫
Toshiba Corporation.
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KIM J.
Samsung Electronics
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- High-K/Metal Gate MOSFETsにおける新しいレイアウト依存性(IEDM特集(先端CMOSデバイス・プロセス技術))
- High-K/Metal Gate MOSFETs における新しいレイアウト依存性