New Approach of Laser-SQUID Microscopy to LSI Failure Analysis

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概要

• 論文の詳細を見る

• We have proposed and successfully demonstrated a two step method for localizing defects on an LSI chip. The first step is the same as a conventional laser-SQUID (L-SQUID) imaging where a SQUID and a laser beam are fixed during LSI chip scanning. The second step is a new L-SQUID imaging where a laser beam is stayed at the point, located in the first step results, during SQUID scanning. In the second step, a SQUID size (Aeff) and the distance between the SQUID and the LSI chip (ΔZ) are key factors limiting spatial resolution. In order to improve the spatial resolution, we have developed a micro-SQUID and the vacuum chamber housing both the micro-SQUID and the LSI chip. The Aeff of the micro-SQUID is a thousand of that of a conventional SQUID. The minimum value of ΔZ was successfully reduced to 25µm by setting both the micro-SQUID and an LSI chip in the same vacuum chamber. The spatial resolution in the second step was shown to be 53µm. Demonstration of actual complicated defects localization was succeeded, and this result suggests that the two step localization method is useful for LSI failure analysis.

• （社）電子情報通信学会の論文
• 2009-03-01

著者

• Nagaishi Tatsuoki

  Equipment Development Division Sumitomo Electric System Solutions

• NIKAWA Kiyoshi

  Test and Analysis Engineering Division, NEC Electronics Corporation

• INOUE Shouji

  Semiconductor Division, TDI Co Ltd.

• MATSUMOTO Toru

  Systems Division, Hamamatsu Photonics K.K.

• MIURA Katsuyoshi

  Department of Information System Engineering, Graduate School of Information Science and Technology,

• NAKAMAE Koji

  Department of Information System Engineering, Graduate School of Information Science and Technology,

• Inoue Shouji

  Semiconductor Division Tdi Co Ltd.

• Nakamae Koji

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• Nikawa Kiyoshi

  Test And Analysis Engineering Division Nec Electronics Corporation

• Nakamae Koji

  Department Of Information System Engineering Graduate School Of Information Science And Technology O

• Miura Katsuyoshi

  Department Of Information System Engineering Graduate School Of Information Science And Technology O

• Matsumoto Toru

  Systems Division Hamamatsu Photonics K.k.

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