Investigation of Mask Deformation by Oxygen-Radical Irradiation during Resist Trimming
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概要
- 論文の詳細を見る
- 2009-10-25
著者
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MIURA Hideo
Fracture and Reliability Research Institute, Tohoku University Graduate School
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KOFUJI Naoyuki
Central Research Laboratory, Hitachi, Ltd.
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Miura Hideo
Fracture And Reliability Research Institute Graduate School Of Engineering Tohoku University
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MIURA Hideo
Fracture and Reliability Research Institute (FRRI), Graduate School of Engineering, Tohoku University
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Kofuji Naoyuki
Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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- Effect of the Local Strain Distribution on the Electronic Conductivity of Carbon Nanotubes
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