Improvement of Bulk CMOS Electrostatic Integrity using Germanium and Carbon co-implantation
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Skotnicki Thomas
Stmicroelectronics
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Boeuf Frederic
Stmicroelectronics
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Pouydebasque Arnaud
Philips Semiconductors
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DUMONT Benjamin
STMicroelectronics
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MILESI Frederic
Ion Beam Services, ZI Peynier-Rousset, rue Gaston Imbert prolongee
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SOUIFI Kader
LPM-INSA de Lyon
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Milesi Frederic
Ion Beam Services Zi Peynier-rousset Rue Gaston Imbert Prolongee
関連論文
- Improvement of Bulk CMOS Electrostatic Integrity using Germanium and Carbon co-implantation
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