Ambient Temperature Compensation of Thin Film Pirani Vacuum Sensor
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概要
- 論文の詳細を見る
A thin film Pirani vacuum sensor having a single microheater and two diode-thermistors (Th-A and Th-B) composed of pn junction diodes on the micro-air-bridge (MAB) is fabricated by micromachining technologies. A method to eliminate the ambient temperature effects based on double pulse-heating (pulse duration: 125ms) up to two different temperatures, Th and Tl, above the room temperature in vacuum sensing is proposed. Pulse-heating has also a merit to prevent temperature increase of the sensor chip. It is demonstrated that the Pirani gauge with a cantilever type MAB structure can almost compensate the ambient temperature effects by double pulse-heating. A method to correct the errors due to the non-linearity in the I-T relationship of the diode-thermistor as a very sensitive temperature sensor is also described.
- 社団法人 電気学会の論文
- 2007-03-01
著者
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Yonekura Hiroshi
Department Of Electronics Tohoku Gakuin University
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Yonekura Hiroshi
Department Of Anatomy Hirosaki University School Of Medicine
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KIMURA Mitsuteru
Department of Electronics, Tohoku Gakuin University
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Kimura Mitsuteru
Dep. Of Electronics Tohoku Gakuin Univ.
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Kimura Mitsuteru
Department Of Electrical Engineering Faculty Of Engineering Tohoku Gakuin University
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