Investigation on the Thin Film Pirani Vacuum Sensor Using A Constant Voltage Drive-Mode Diode-Heater

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概要

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• A thin film Pirani vacuum sensor having a single micro-heater and two diode temperature sensors composed of pn junction diodes on the sensing cantilever, fabricated by micromachining technologies, is driven by a constant applied voltage driving mode using the diode heater to enhance the pressure sensitivity. In these experiments new diode-sensors are used as a temperature sensor, which has a proportional output signal voltage ΔV to the absolute temperature T as ΔV=αT. These new type diode-sensors are useful to measure the temperature difference ΔT between these diode sensors. In this pressure sensing the null detection method is adopted for accurate measurements. In the low pressure range such as 1×10-3-1×100 Pa the diode-thermistor will be useful because of its higher temperature sensitivity. It is demonstrated that this thin film Pirani vacuum sensor can measure the wide pressure range of 1×10-3 to 1×105 Pa, which is about 2 order wider pressure range than that of usual Pirani gauge.

• 社団法人 電気学会の論文
• 2008-05-01

著者

• Kimura Mitsuteru

  Department Of Electrical Engineering Faculty Of Engineering Tohoku Gakuin University

• Takashima Noriaki

  Department Of Electronics Tohoku Gakuin University

関連論文

• Ambient Temperature Compensation of Thin Film Pirani Vacuum Sensor
• Optical Waveguides along Both Sides of a Groove in Silicon
• Pn Junction Temperature-Sensor by Use of Superimposed AC Signal
• Proposal of a New Type Thin Film Vacuum Sensor Using the Short Circuit Current-Detection Type Thermocouple
• Investigation on the Thin Film Pirani Vacuum Sensor Using A Constant Voltage Drive-Mode Diode-Heater

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