Proposal of a New Type Thin Film Vacuum Sensor Using the Short Circuit Current-Detection Type Thermocouple

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概要

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• We have proposed the thin film vacuum sensor that has a cantilever structure with new temperature difference sensors of the short circuit Seebeck-Current-Detection type thermocouple in order to get higher sensitivity in the higher vacuum range. Temperature difference, which should be zero under the higher vacuum, between microheater and thermally isolated heading area from the microheater is measured under the vacuum pressure. Even a little temperature difference in our new sensor can be measured in very lower vacuum pressure range by the signal amplification than that of the traditional Pirani vacuum sensor. In our experiments, the short circuit Seebeck-Current-Detection type thermocouple is used to measure the very small temperature difference. Measurement of very wide vacuum pressure range between 105-10-2 Pa is achieved by the prototype sensor.

• 社団法人 電気学会の論文
• 2009-11-01

著者

• Kimura Mitsuteru

  Department Of Electrical Engineering Faculty Of Engineering Tohoku Gakuin University

• Takashima Noriaki

  Department Of Electronics Tohoku Gakuin University

関連論文

• Ambient Temperature Compensation of Thin Film Pirani Vacuum Sensor
• Optical Waveguides along Both Sides of a Groove in Silicon
• Pn Junction Temperature-Sensor by Use of Superimposed AC Signal
• Proposal of a New Type Thin Film Vacuum Sensor Using the Short Circuit Current-Detection Type Thermocouple
• Investigation on the Thin Film Pirani Vacuum Sensor Using A Constant Voltage Drive-Mode Diode-Heater

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