Optical Waveguides along Both Sides of a Groove in Silicon
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概要
- 論文の詳細を見る
New fabrication methods of waveguides with an transverse measurement of about 1 μm and of a Y junction using a simple photolithographic technique are proposed. The waveguides consist of a high refractive index plastic such as polystyrene filling up the concave sides of a groove produced in a Si wafer by means of an anisotropic etching technique. Propagation of a He-Ne laser beam through these waveguides with an transverse measurement of about 5 μm is demonstrated.
- 社団法人応用物理学会の論文
- 1980-07-05
著者
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Hata Kiyomi
Department Of Electrical Engineering Faculty Of Engineering Tohoku Gakuin University
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Miyamoto Toshihiko
Department of Neurological Surgery,Okayama University Medical School
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KIMURA Mitsuteru
Department of Electronics, Tohoku Gakuin University
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Miyamoto Toshihiko
Department Of Electrical Engineering Faculty Of Engineering Tohoku Gakuin University
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Kimura Mitsuteru
Department Of Electrical Engineering Faculty Of Engineering Tohoku Gakuin University
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