Generation of Air Microplasma Jet and Its Application to Local Etching of Polyimide Films

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-06-30

著者

• YOSHIKI Hiroyuki

  Department of Electrical and Electronic Engineering, Tsuruoka National College of Technology

関連論文

• Generation of Air Microplasma Jet and Its Application to Local Etching of Polyimide Films
• Generation of Integrated Atmospheric-Pressure Microplasmas
• Localized Plasma Processing of Materials Using Atmospheric-Pressure Microplasma Jets
• Localized Removal of a Photoresist by Atmospheric Pressure Micro-plasma Jet Using RF Corona Discharge
• Generation of Air Microplasma Jet and Its Application to Local Etching of Polyimide Films
• Localized Plasma Processing of Materials Using Atmospheric-Pressure Microplasma Jets
• Generation of Integrated Atmospheric-Pressure Microplasmas

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