SPM Studies of Hydrogen-Induced Degradation of Pt/PLZT/Pt Capacitors
スポンサーリンク
概要
- 論文の詳細を見る
- 2000-08-28
著者
-
YOSHIDA Chikako
Fujitsu Laboratories Ltd.
-
Tamura Tetsuro
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
-
Takasaki Kanetake
Fujitsu Laboratories Limited
-
Yoshida Chikako
Fujitsu Limited
-
Kondo Kazuaki
Fujitsu Laboratories Limited
-
Tamura Tetsuro
Fujitsu Limited
-
TAMURA Tetsuro
Fujitsu Laboratories Ltd.
関連論文
- Electric Field Effect in LaTiO_3/SrTiO_3 Heterostructure
- High Speed Resistive Switching in Pt/TiO_2/TiN Resistor for Multiple-Valued Memory Device
- Electric Field Effect in LaTiO_3/SrTiO_3 Heterostructure
- High-Density Layer at the SiO_2/Si Interface Observed by Difference X-Ray Reflectivity
- High-Accuracy X-ray Reflectivity Study of Native Oxide Formed in Chemical Treatment
- Growth of Epitaxial CeO_2 Films on (1012) Sapphire by Halide Source Plasma Enhanced Chemical Vapor Deposition
- Lowering the Switching Current of Resistance Random Access Memory Using a Hetero Junction Structure Consisting of Transition Metal Oxides
- Suppression of Hot Carrier Degradation in LDD n-MOSFETs with Gate N_2O-Nitrided O_3-Oxide
- Identification of MOS Gate Dielectric-Breakdown Spot Using High-Selectivity Etching
- SPM Studies of Hydrogen-Induced Degradation of Pt/PLZT/Pt Capacitors
- Instability of SiO_2 Film Caused by Fluorine and Chlorine Inclusion