Synthesis of Metallic Iridium Oxide Nanowires via Metal Organic Chemical Vapor Deposition

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概要

• 論文の詳細を見る

• Iridium oxide (IrO2) nanowires with diameters of 10 to 50 nm and length of 1 to 2 microns were synthesized using Metal Organic Chemical Vapor Deposition (MOCVD) with (methylcyclopentadienyl) (1,5-cyclooctadiene) iridium (I) as the precursor on Si or SiO2 substrate with and without metal nanoparticles as catalysts. Scanning electron microscopy (SEM) and low-resolution transmission electron microscopy (LRTEM) studies show very uniform nanowires diameters and high-resolution (HR) TEM image and electron diffraction pattern reveal single crystal IrO2 nanowires having rutile structure with the growth direction along $\langle 001\rangle$. HRTEM studies further indicate that the IrO2 nanowires were grown via vapor-solid mechanism having naturally formed sharp tips. It was found that a thin layer of metal film on Si substrate, such as Au, Ti, Ni, and Co, facilitate IrO2 nanowires synthesis and selective growth of IrO2 nanowires on substrate was realized. The IrO2 nanowires are metallic conductive using titanium as contact without annealing. The ability to grow single crystal metallic IrO2 nanowires opens up novel opportunities in vacuum electronics, nanoelectronics, field emission and display applications.

• Japan Society of Applied Physicsの論文
• 2005-03-10

著者

• ZHANG Fengyan

  Sharp Laboratories of America, Inc.

• Hsu Sheng-teng

  Sharp Laboratories Of America Inc.

• Zhang Fengyan

  Sharp Laboratories Of America Inc.

• Pan Wei

  Sharp Laboratories Of America Inc.

• Barrowcliff Robert

  Sharp Laboratories of America, Inc. 5700 NW Pacific Rim Blvd, Camas, Washington 98607, U.S.A.

• Stecker Greg

  Sharp Laboratories of America, Inc. 5700 NW Pacific Rim Blvd, Camas, Washington 98607, U.S.A.

• Wang Deli

  Department of Electrical and Computer Engineering, University of California at San Diego, 9500 Gilma

• Wang Deli

  Department Of Electrical And Computer Engineering University Of California At San Diego

• Stecker Greg

  Sharp Laboratories Of America Inc.

• Barrowcliff Robert

  Sharp Laboratories Of America Inc.

関連論文

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• Studies of Ir-Ta-O as High Temperature Stable Electrode Material and Its Application for Ferroelectric SrBi_2Ta_2O_9 Thin Film Deposition
• Synthesis of Metallic Iridium Oxide Nanowires via Metal Organic Chemical Vapor Deposition
• Fabrication of Submicron IrO2 Nanowire Array Biosensor Platform by Conventional Complementary Metal–Oxide–Semiconductor Process

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