Application of focused ion beam techniques and transmission electron microscopy to thin-film transistor failure analysis
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概要
- 論文の詳細を見る
- 2004-10-01
著者
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KURODA Kotaro
Graduate School of Engineering, Nagoya University
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SAKA Hiroyasu
Graduate School of Engineering, Nagoya University
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Saka H
Nagoya Univ. Nagoya Jpn
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Kuroda Kotaro
Department Of Quantum Engineering Nagoya University
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TSUJIMOTO Katsuhiro
Research Laboratory for High Voltage Electron Microscopy, Kyushu University
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Kuroda Kotaro
Graduate School Of Engineering Nagoya University
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TSUJI Satoshi
Yamato Site, IBM Japan, Ltd
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Tsuji Satoshi
Display Business Unit Ibm Japan Ltd.
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Tsujimoto Katsuhiro
Research Laboratory Of High-voltage Electron Microscope Kyushu University
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Tsujimoto Katsuhiro
Research Laboratory For High Voltage Electron Microscopy Kyushu University
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SAKA H.
Graduate School of Engineering, Nagoya University
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