FIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si

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概要

• 論文の詳細を見る
• Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
• 1997-02-01

著者

• Saka H

  Nagoya Univ. Nagoya Jpn

• Saka H.

  Department Of Materials Science And Engineering Faculty Of Engineering Nagoya University

• Abe S.

  Department of Anatomy, Faculty of Medicine, Kyoto University

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• FIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si

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