Resistive Oxygen Sensors Using Cerium Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition and Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-10-15
著者
-
SHIN Woosuck
Advanced Manufacturing Research Institute, Sensor Integration Group, National Institute of Advanced
-
IZU Noriya
Advanced Manufacturing Research Institute, Sensor Integration Group, National Institute of Advanced
-
MATSUBARA Ichiro
Advanced Manufacturing Research Institute, Sensor Integration Group, National Institute of Advanced
-
MURAYAMA Norimitsu
Advanced Manufacturing Research Institute, AIST
-
KANZAKI Shuzo
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Tec
関連論文
- High-Temperature Thermoelectric Measurement of B-Doped SiGe and Si Thin Films
- Micromachined Thermoelectric Hydrogen Sensor of Double-Membrane Structure
- Resistive Oxygen Sensors Using Cerium Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition and Sputtering
- Thermoelectric Properties of RF-Sputtered SiGe Thin Film for Hydrogen Gas Sensor
- Resistive Oxygen Sensors Using Cerium Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition and Sputtering
- 水素ガスセンサの応答性能の実際的試験法
- Thermoelectric Properties of RF-Sputtered SiGe Thin Film for Hydrogen Gas Sensor